Corner Cube Reflectors by Surface Tension Self-Assembly
نویسنده
چکیده
A method of fabricating micromachined Corner Cube Reflectors (CCRs) with high surface flatness and accurate control of mirror angle is demonstrated. A parallel, automated three-dimensional self-assembly process is presented, using bonded silicon-on-insulator material and out-of-plane rotation powered by the surface tension of thick photoresist pads. Precise alignment is achieved by minimising the number of movable parts and controlling the assembly with a mechanical limiter. The optical performance of the assembled components is demonstrated, and an angular alignment accuracy of < 3 mrad is achieved.
منابع مشابه
Design, fabrication and test of self-assembled optical corner cube reflectors
Active and passive micromachined corner cube reflectors (CCRs) with high surface flatness and precise assembly are demonstrated by out-of-plane rotation of bonded silicon parts powered by the surface tension of thick photoresist pads. A two-mask fabrication process is used, and an angular alignment accuracy of <0.18◦ is achieved by minimizing the number of movable parts and controlling the asse...
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